MICSYS-SA1

Item number: 549-701D

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MICSYS-SA1

Item number: 549-701D

Suggested retail price: 19,276.54*
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DescriptionThis high-accuracy non-contact 2D encoder uses image correlation.
The MICSYS-SA1 offers you the following benefits:
  • Simultaneous XY position measurements.
  • Nanometer resolution.
  • Possible to measure on workpiece.
  • You can align it easily.
  • It allows you to carry out minute strain and deflection measurements.

Applications: 
- Nano positioning
- Monitor performance of metrology and manufacturing frames (drift, hysteresis, repeatability)
- Measure deformation

This high-accuracy non-contact 2D encoder uses image correlation.
The MICSYS-SA1 offers you the following benefits:
  • Simultaneous XY position measurements.
  • Nanometer resolution.
  • Possible to measure on workpiece.
  • You can align it easily.
  • It allows you to carry out minute strain and deflection measurements.

Applications: 
- Nano positioning
- Monitor performance of metrology and manufacturing frames (drift, hysteresis, repeatability)
- Measure deformation

Accuracy:
± 100 nm
Linearity (at 20°):
80 nm
Working distance:
10±0,2 mm (including thickness of standard target : 6,1 mm)
Data Update Period:
20Hz
Laser wavelength:
650 nm (Visible) Class 2
Operating temperature and humidity:
Detector: 15-25°C, I/F unit: 0-40°C, 20-80% RH (Non-considering)
Interface:
RS-232C
Standard accessories:
Standard target, Sample software for data correlation (on CD-ROM)
Power supply:
AC100-240V 45W 50/60Hz
Storage temperature and humidity range:
-10-50°C / 85%RH (Non-condensing)
*VAT excluded. All products are intended to be sold to commercial customers.
Product illustrations are without obligation. Product descriptions, in particular any and all technical specifications, are only binding when explicitly agreed upon.