Measuring Microscope Hyper MF/MF-U Generation B Series

This measuring microscope has one of the highest XY measuring accuracies at 0,9+3L/1000 μm.
The Hyper MF-B/MF-UB offers you the following benefits:
  • One of the highest XY measuring accuracies in the world (0,9+3L/1000)1 μm
  • Selectable LAF (Laser Auto Focus) function.
  • High operability and repeatability.
  • Three-axis motorized control.
  • You are offered the power-drive auto focus unit as standard.
  • A range of useful fixtures is available that includes a wafer holder and swivel-centre support.

1. (L = measured length (mm) in XY plane, stage unloaded).